Microrobotics

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In recent years, the field of micro-electro-mechanical systems (MEMS) has evolved from experimental and prototype microscopic structures to successful commercial products and systems of increasing complexity. This book introduces computational models and algorithmic tools for the design and control of MEMS actuators and microrobotic systems. It gives an overview of important issues in microrobotics, and develops techniques and algorithms for the design and control of massively parallel MEMS actuators. New concepts are explained with examples and results from recent researches and experiments.In particular, the author develops the concept of programmable force fields as a high-level model of microactuation. Programmable force fields allow the system designer and user to think about micromanipulation at "task level" without having to worry about the physical details. Implementation of programmable force fields is possible with various MEMS devices, several of which are discussed in detail.This book is aimed at designers of MEMS devices and microrobotic systems, as well as people with a general understanding of issues in MEMS and robotics.