Center for Electronics and Electrical Engineering Technical Publication Announcements Covering Center Programs, October-December 1984 With 1985 Ceee Events Calendar (Classic Reprint)

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Excerpt from Center for Electronics and Electrical Engineering Technical Publication Announcements Covering Center Programs, October-December 1984 With 1985 Ceee Events CalendarCandela, g.a., and chandler-horowitz, D., An Ellipsometry System for High Accuracy Metrology of Thin Films, Proc. Spie The International Society for Optical Engineering, 480, Inte grated Circuit Metrology II, pp. 2-8, spie, p.o. Box 20, Bellingham, WA 98227 [paper given at Conference, Arlington, va, May 2-3, A computer-controlled spectroscopic ellipsometer of high accuracy has been designed and constructed. A theta-two theta goniometer unit and optical rail system allows various ellipsometric methods to be used to measure the param eters A and 1p. Three important methods under study for accuracy, precision, and speed of measurement are the convention al null method, the rotating analyzer method, and the principal angle method. All the goniometer angles, including the angle of incidence, can be measured to an accuracy of deg. The present light sources are two lasers with fixed wavelengths, nm and nm, in addition to a monochromator that can be used to scan the wavelength range from 190 to 2600 nm. A unique sample align ment system which utilizes two quadrant detectors has been developed and a sim ple but very effective nulling scheme is used. This instrument is primarily used for the metrology of semiconductor mate rials and for the calibration of refer ence standards for thin film thickness and refractive index.About the PublisherForgotten Books publishes hundreds of thousands of rare and classic books. Find more at www.forgottenbooks.comThis book is a reproduction of an important historical work. Forgotten Books uses state-of-the-art technology to digitally reconstruct the work, preserving the original format whilst repairing imperfections present in the aged copy. In rare cases, an imperfection in the original, such as a blemish or missing page, may be replicated in our edition. We do, however, repair the vast majority of imperfections successfully, any imperfections that remain are intentionally left to preserve the state of such historical works.