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  • Efficient Extreme Ultra-Violet Mirror Design: An Fdtd Approach

Efficient Extreme Ultra-Violet Mirror Design: An Fdtd Approach

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Efficient Extreme Ultraviolet Mirror Design describes an approach to designing EUV mirrors with reduced computational time and memory requirements, providing a comprehensive grounding in the fundamentals of the EUV mirror and knowledge of the finite-difference time-domain (FDTD) method. It is an essential reference for EUV industry professionals.
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