Experimental Characterization Techniques for Micro/Nanoscale Devices

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Characterization Techniques for Micro/Nanoscale Devices introduces commonly utilized and important techniques for the dynamic measurement and characterization of MEMS and NEMS devices. It outlines many of the techniques currently available for the test and characterization of MEMS and gives guidance in choosing an adequate technique for monitoring certain signals. After reading this book, MEMs Designers and researchers will be able to determine the best test technique for his/her application, put together a viable experimental setup, complete the measurements, and do appropriate error and/or fatigue analysis on the collected data. TOC:Motivation and History of Test through Examples.- Motivation.- Applications utilizing dynamic MEMS/NEMS.- Device Test/Characterization/Modeling Techniques.- Optical methods for dynamic characterization.- Static and Quasi-static measurements for characterizing MEMS/NEMS.- Actuation Methods.- Parameterization/Modeling.- Characterizing an in-plane MEMS actuator.- Material characterization.- Material Characterization.- Failure of MEMS and Reliability testing.- Specialized Testing and Design of Test experiments.- Specialized test apparatus.- Design for Test.- Appendix.- Quick Tips for MEMS/NEMS testing and design.- Capactitive measurements for MEMS.- Index.