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- Manufacturing Techniques for Microfabrication and Nanotechnology
Manufacturing Techniques for Microfabrication and Nanotechnology
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Focuses on various trends in industrial lithography and pattern transfer. This book covers photo lithography and next generation lithographies and presents a number of subtractive etching techniques, including dry, chemical, and electrochemical wet. It explains thermal, electro thermal, and mechanical removing techniques.
Lieferbar in ca. 10-20 Arbeitstagen