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- Nanofabrication Using Focused Ion and Electron Beams
Nanofabrication Using Focused Ion and Electron Beams
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This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.
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