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- Nanolithography and Implications on Circuit Design
Nanolithography and Implications on Circuit Design
Angebote / Angebote:
This book provides a comprehensive and updated "state-of-the-art" compilation on nanolithography and implications on future nanometer IC designs. Its scope in a bottom-up manner, includes the underlying equipment and process issues for nanolithography, the computational lithography aspects, and the key design and CAD issues and possible solutions. The subjects covered include: introduction of nanolithography process and trends, computational lithography (including lithography simulations, OPC, inverse lithography, pixilated mask, source mask optimization, etc.), lithography-aware analysis & design, and future lithography technologies and EDA impact.
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