News Briefs, Vol. 98

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Excerpt from News Briefs, Vol. 98: Journal of Research of the National Institute of Standards and Technology, July-August 1993Successive phases of this program, currently under development, are expected to extend the flow range to - 3) x 105 soem, which is the full range of interest to the semiconductor processing industries. Once the program is completed, the expected significant improvements in smi gas flow measurement and control should lead to enhanced productivity in these industries.About the PublisherForgotten Books publishes hundreds of thousands of rare and classic books. Find more at www.forgottenbooks.comThis book is a reproduction of an important historical work. Forgotten Books uses state-of-the-art technology to digitally reconstruct the work, preserving the original format whilst repairing imperfections present in the aged copy. In rare cases, an imperfection in the original, such as a blemish or missing page, may be replicated in our edition. We do, however, repair the vast majority of imperfections successfully, any imperfections that remain are intentionally left to preserve the state of such historical works.