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- RF MEMS switches for configurable RF devices
RF MEMS switches for configurable RF devices
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This book illustrates a novel RF MEMS capacitiveswitch design that is Complementary Metal-OxideSemiconductor (CMOS) process-compatible. The switchstructure is cantilever with fingers for capacitivecoupling. The vertical bending characteristic ofbimorph cantilever beams under different temperaturesis utilized to turn the switch on and off. A set ofelectrical, mechanical, and thermal models isestablished, and cross-domainelectro-thermo-mechanical simulations are performedto optimize the design parameters of the switch. This switch has a vast number of applications in theRF/microwave field, such as configurable voltagecontrol oscillators, filters, and configurablematching networks. To illustrate the applications of the switch, twobroadband communication applications for the designedMEMS switch, broadband voltage controlled oscillator(VCO) and broadband filter, were demonstrated. Thelow-loss, low-noise nature of the MEMS switchimproved VCO phase noise performance. In addition, wedemonstrate the use of MEMS switches to enable largecorner frequency adjustments in high-frequency, lowpass filter designs.
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