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- Silicon Anodization as a Structuring Technique
Silicon Anodization as a Structuring Technique
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Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.ContentsSilicon Anodization: State of the ArtExperimental, Characterization and Simulation MethodsMicroscale Study of Anodization ProcessAnodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineeringPractitioners in the area of microsystems, silicon processing and electrochemical material processing
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