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- Topics In Growth And Device Processing Of Iii-v Semiconductors
Topics In Growth And Device Processing Of Iii-v Semiconductors
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A description of advanced epitaxial growth and self-aligned processing techniques for the fabrication of III-V semiconductor devices such as heterojunction bipolar transistors and high electron mobility transistors. This work also details the use of carbon-doping and dry etching techniques.
Folgt in ca. 15 Arbeitstagen
